Changes

'''MEMS''' - Micro-Electro-Mechanical Systems, or ''MEMS'', are nano-scale items that combine both electronic (integrated circuits) and mechanical (pumps, mirrors, servos) components to create machines which function on a microscopic scale.  <ref>http://www.mems-exchange.org/MEMS/what-is.html</ref>

'''MEMS''' - Micro-Electro-Mechanical Systems, or ''MEMS'', are nano-scale items that combine both electronic (integrated circuits) and mechanical (pumps, mirrors, servos) components to create machines which function on a microscopic scale.  <ref>http://www.mems-exchange.org/MEMS/what-is.html</ref>

'''Self-assembly''' - Reversible processes in which pre-existing parts or disordered components of a preexisting system form structures of patterns.<ref>http://www.edinformatics.com/nanotechnology/self_assembly.htm</ref>  Use of self-assembly techniques allows for bottom-up construction of components, and is used in applications where top-down methods like lithography are impractical.

'''Self-assembly''' - Reversible processes in which pre-existing parts or disordered components of a preexisting system form structures of patterns.<ref>http://www.edinformatics.com/nanotechnology/self_assembly.htm</ref>  Use of self-assembly techniques allows for bottom-up construction of components, and is used in applications where top-down methods like [[lithography]] are impractical.

==Nanofabrication==

==Nanofabrication==