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→top: HTTP --> HTTPS [#1], replaced: http://books.google.com → https://books.google.com
|chapter=The History Of Vacuum Science and Vacuum Technology
|chapter=The History Of Vacuum Science and Vacuum Technology
|year=2008
|year=2008
|url=http://books.google.com/books?id=Gco_ytUu4QYC&dq=molecular+pump&source=gbs_navlinks_s
|url=https://books.google.com/books?id=Gco_ytUu4QYC&dq=molecular+pump&source=gbs_navlinks_s
|quote=
|quote=
|isbn=978-3-527-40723-1}}</ref>
|isbn=978-3-527-40723-1}}</ref>