Changes

'''Micrometer''' - One millionth of a [[meter]].

'''Micrometer''' - One millionth of a [[meter]].

'''Angstrom''' - One tenth of a nanometer.

'''Angstrom''' - One tenth of a nanometer (this isn't an SI unit)

'''MEMS''' - Micro-Electro-Mechanical Systems, or ''MEMS'', are nano-scale items that combine both electronic (integrated circuits) and mechanical (pumps, mirrors, servos) components to create machines which function on a microscopic scale.  <ref>http://www.mems-exchange.org/MEMS/what-is.html</ref>

'''MEMS''' - Micro-Electro-Mechanical Systems, or ''MEMS'', are nano-scale items that combine both electronic (integrated circuits) and mechanical (pumps, mirrors, servos) components to create machines which function on a microscopic scale.  <ref>http://www.mems-exchange.org/MEMS/what-is.html</ref>